An X-Ray Method for Direct Determination of the Strain State and Strain Relaxation in Micron-Scale Passivated Metallization Lines During Thermal Cycling

Journal of Materials Research

Volumn 9, Issue 1, 1994, Pages 13-24

  Besser, Paul R ^a   Brennan, Sean ^b   Bravman, John C ^a  

^a STANFORD UNIVERSITY   (United States)

^b SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; METALLIZING; NUMERICAL METHODS; RELAXATION PROCESSES; SILICON NITRIDE; STRAIN; STRESS ANALYSIS; SYNCHROTRON RADIATION; THERMAL EFFECTS; THERMAL EXPANSION; X RAY ANALYSIS;

MICRON SCALE PASSIVATED METALLIZATION LINES; STRAIN RELAXATION; STRAIN STATE; THERMAL CYCLING;

PASSIVATION;

EID: 0028319559     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1994.0013     Document Type: Article

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