Studies of laser-generated ultrasound using a micromachined silicon electrostatic transducer in air

Journal of the Acoustical Society of America

Volumn 95, Issue 5, 1994, Pages 2567-2575

  Wright, William M ^b   Schindel, David W ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b QUEEN S UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; ARTICLE; LASER; PRIORITY JOURNAL; SHEAR STRESS; TRANSDUCER; ULTRASOUND;

EID: 0028233709     PISSN: 00014966     EISSN: NA     Source Type: Journal    
DOI: 10.1121/1.409826     Document Type: Article

References (29)

1. J.-P. Monchalin, “Optical detection of ultrasound,” IEEE Trans. Ul-trason. Ferroelec. Freq. Control. UFFC-33, 485–499 (1986).
2. C. B. Scruby and L. E. Drain, Laser Ultrasonics: Techniques and Applications (Hilger, Bristol, 1990).
3. H. M. Frost, “Electromagnetic-Ultrasound Transducers: Principles, Practice and Applications,” in Physical Acoustics’Principles and Methods, edited by W. P. Mason and R. N. Thurston (Academic, New York, 1979), Vol. XIV, pp. 179–275.
4. W. Sachse and N. N. Hsu, “Ultrasonic Transducers for Materials Testing and Their Characterization,” in Physical Acoustics’Principles and Methods, edited by W. P. Mason and R. N. Thurston (Academic, New York, 1979), Vol. XIV, pp. 277-406.
5. W. Manthey, N. Kroemer, and V. Magori, “Ultrasonic transducers and transducer arrays for applications in air,” Meas. Sci. Tech. 3, 249–261 (1992).
6. R. M. White, “Generation of elastic waves by transient surface heating,” J. Appl. Phys. 34, 3559–3567 (1963).
7. D. A. Hutchins, “Ultrasonic generation by pulsed lasers,” in Physical Acoustics’Principles and Methodst edited by W. P. Mason and R. N. Thurston (Academic, New York, 1988), Vol. XVIII, pp. 21–123.
8. B. Sullivan and A. C. Tam, “Profile of laser-produced acoustic pulse in a liquid,” J. Acoust. Soc. Am. 75, 437–441 (1984).
9. J. W. Wagner, “Optical detection of ultrasound,” in Physical Acoustics’Principles and Methods, edited by W. P. Mason and R. N. Thurston (Academic, New York, 1990), Vol. XIX, pp. 201–266.
10. J.-P. Monchalin, J.-D. Aussel, P. Bouchard, and R. Heon, “Laser-ultrasonics for industrial applications,” in Review of Progress in Quantitative NDEy edited by D. O. Thompson and D. E. Chimenti (Plenum, New York, 1988), Vol. 7B, pp. 1607–1614.
11. C. A. Calder and W. W. Wilcox, “Non-contact material testing using laser energy deposition and interferometry,” Mater. Eval. 38, 86–91 (1980).
12. T. R. Gururaja, W. A. Schulze, L. E. Cross, R. E. Newnham, B. A. Auld, and Y. J. Wang, “Piezoelectric composite materials for ultrasonic transducer applications. Part I: Resonant modes of vibration of PZT Rod-Polymer composites,” IEEE Trans. Sonics Ultrason. SU-32, 481–498 (1985).
13. J. A. Hossack and G. Hayward, “Finite-element analysis of 1–3 composite transducers,” IEEE Trans. Ultrason. Ferroelec. Freq. Control UFFC-38, 618–629 (1991).
14. P. Kleinschmidt and V. Magori, “Ultrasonic robotic sensors for exact short range distance measurement,” Proc. 1985 IEEE Ultrason. Symp. 457–462 (1985).
15. L. C. Lynnworth, “Ultrasonic impedance matching from solids to gases,” IEEE Trans. Sonics Ultrason. SU-13, 37–48 (1965).
16. M. Teshigawara, F. Shibata, and H. Teramoto, “High resolution (0.2 mm) and fast response (2 ms) range finder for industrial use in air,” Proc. 1989 IEEE Ultrason. Symp. 639–642 (1989).
17. R. Lerch and G. M. Sessler, “Microphones with rigidly supported membranes,” J. Acoust. Soc. Am. 67, 1379–1381 (1980).
18. H. Ohigashi, K. Koga, M. Suzuki, and T. Nakanishi, “Piezoelectric and ferroelectric properties of P(VDF-TrFE) copolymers and their application to ultrasonic transducers,” Ferroelectrics 60, 263–276 (1984).
19. M. Platte, “PVDF ultrasonic transducers,” Ferroelectrics 75, 327–337 (1987).
20. H. Carr, W. S. H. Munro, M. Rafiq, and C. Wykes, “Developments in capacitive transducers,” Nondest. Test. Eval. 10, 3–14 (1992).
21. W. Kuhl, G. R. Schodder, and F.-K. Schroder, “Condenser transmitters and microphones with solid dielectric for airborne ultrasonics,” Acustica 4, 519–532, (1954).
22. H. Carr and C. Wykes, “Diagnostic measurements in capacitive transducers,” Ultrasonics 31, 13–20 (1993).
23. K. Suzuki, K. Higuchi, and H. Tanigawa, “A Silicon Electrostatic Ultrasonic Transducer,” IEEE Trans. Ultrason. Ferroelec. Freq. Control UFFC-36, 620–627 (1989).
24. D. W. Schindel and D. A. Hutchins, “Capacitance devices for the controlled generation of ultrasonic fields in liquids,” Proc. IEEE 1991 Ul-trason. Symp., 301–304 (1991).
25. D. W. Schindel, D. A. Hutchins, L. Zou, and M. Sayer, “Capacitance devices for the controlled generation of air-borne ultrasonic fields,” Proc. IEEE 1992 Ultrason. Symp., 843–846 (1992).
26. D. W. Schindel, D. A. Hutchins, L. Zou, and M. Sayer, “Capacitance transducers for generating ultrasonic fields in liquids and gases,” in Proceedings of the IEE International Conference on Acoustic Sensing and Imaging (IEE, London, 1993), conference publication No. 369, pp. 7–12.
27. D. W. Schindel, D. A. Hutchins, L. Zou, and M. Sayer, “The design and characterization of micromachined air-coupled capacitance transducers”, submitted to IEEE Trans. Ultrason. Ferroelec. Freq. Control.
28. J. Blitz, Fundamentals of Ultrasonics (Butterworths, London, 1967), 2nd ed.
29. I. A. Viktorov, Rayleigh and Lamb Waves: Physical Theory and Applications (Plenum, New York, 1967).