Enhancing reliability of CMOS devices using electrical techniques and electron spin resonance spectroscopy

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1994, Pages 410-419

  Evans, Howard L ^a   Lowry, Robert K ^a   Schultz, William L ^a   Morthorst, Thomas J ^a   Lenahan, Pat M ^a   Conley, John F ^a  

^a INTERSIL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPARATOR CIRCUITS; CRYSTAL DEFECTS; ELECTRIC NETWORK TOPOLOGY; ELECTRIC PROPERTIES; ELECTRON SPECTROSCOPY; INTEGRATED CIRCUIT MANUFACTURE; LINEAR INTEGRATED CIRCUITS; MONITORING; PROCESS CONTROL; RELIABILITY;

CMOS ANALOG COMPARATOR CIRCUITS; DEFECT DETECTION; ELECTRON SPIN RESONANCE SPECTROSCOPY; NEUTRAL HOLE TRAPS; THRESHOLD VOLTAGE SHIFTS;

CMOS INTEGRATED CIRCUITS;

EID: 0028196378     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/relphy.1994.307805     Document Type: Conference Paper

References (32)