High field emission related thin oxide wearout and breakdown

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1994, Pages 143-153

  Dumin, D J ^a   Mopuri, S ^a   Vanchinathan, S ^a   Scott, R S ^a   Subramoniam, R ^a   Lewis, T G ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC FIELD EFFECTS; OXIDES; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MODELS; THERMAL EFFECTS; THIN FILMS; WEAR OF MATERIALS;

HIGH FIELD EMISSION RELATED THIN OXIDE BREAKDOWN; HIGH FIELD EMISSION RELATED THIN OXIDE WEAROUT; TRAP GENERATION MODEL;

SEMICONDUCTOR MATERIALS;

EID: 0028196374     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/relphy.1994.307844     Document Type: Conference Paper

References (47)