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Volumn 16, Issue 1, 1994, Pages 49-55

Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control

Author keywords

feed forward control; hysteresis effects; hysteresis suppression; piezoelectric actuators; PZT ceramics; scanning microscopy

Indexed keywords

CERAMIC MATERIALS; COMPUTER APPLICATIONS; CONTROL SYSTEMS; ERRORS; HYSTERESIS; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; PIEZOELECTRIC DEVICES; PROBES; PROCESS CONTROL; SCANNING;

EID: 0028196013     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(94)90018-3     Document Type: Article
Times cited : (142)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.