Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control

Precision Engineering

Volumn 16, Issue 1, 1994, Pages 49-55

  Jung, Seung Bae ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

feed forward control; hysteresis effects; hysteresis suppression; piezoelectric actuators; PZT ceramics; scanning microscopy

Indexed keywords

CERAMIC MATERIALS; COMPUTER APPLICATIONS; CONTROL SYSTEMS; ERRORS; HYSTERESIS; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; PIEZOELECTRIC DEVICES; PROBES; PROCESS CONTROL; SCANNING;

FEED FORWARD MODEL REFERENCE CONTROL; HYSTERESIS EFFECTS; HYSTERESIS SUPPRESSION; PIEZOELECTRIC ACTUATORS; PZT CERAMICS; SCANNING ACCURACY; SCANNING MICROSCOPY;

ACTUATORS;

EID: 0028196013     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(94)90018-3     Document Type: Article

References (21)

1. IEEE Standard on Piezoelectricity
2. A piezoceramic fine movement control
3. Piezo-driven 50-μm range stage with subnanometer resolution
4. A scanning tunneling microscope with a wide sampling range
5. Scanning tunneling microscopy
6. Scanning tunneling optical microscopy
7. New form of scanning optical microscopy
8. Scanning tunneling and atomic force microscopy combined
9. Novel optical approach to atomic force microscopy
10. Atomic force microscopy
11. Digital wavefront measuring interferometer for testing optical surface and lenses
12. Step height measurement using two-wavelength phase shifting interferometry
13. Multilayer piezoelectric ceramic actuator with varying thickness layer
14. Improving the linearity of piezoelectric ceramic actuators
15. Temperature characteristics for multilayer piezoelectric ceramic actuator
16. Piezoelectric-supported thrust bearing for the tool slide of a diamond turning machine
17. A fast response piezoelectric actuator for servo correction of systematic errors in precision machining
18. The behavior and calibration of some piezoelectric ceramics used in the STM
19. Precise positioning problems using piezoelectric actuator with force transmission through mechanical contact
20. Positioning table with high accuracy and high speed