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Volumn 16, Issue 1, 1994, Pages 49-55
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Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control
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Author keywords
feed forward control; hysteresis effects; hysteresis suppression; piezoelectric actuators; PZT ceramics; scanning microscopy
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Indexed keywords
CERAMIC MATERIALS;
COMPUTER APPLICATIONS;
CONTROL SYSTEMS;
ERRORS;
HYSTERESIS;
MATHEMATICAL MODELS;
MICROSCOPIC EXAMINATION;
PIEZOELECTRIC DEVICES;
PROBES;
PROCESS CONTROL;
SCANNING;
FEED FORWARD MODEL REFERENCE CONTROL;
HYSTERESIS EFFECTS;
HYSTERESIS SUPPRESSION;
PIEZOELECTRIC ACTUATORS;
PZT CERAMICS;
SCANNING ACCURACY;
SCANNING MICROSCOPY;
ACTUATORS;
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EID: 0028196013
PISSN: 01416359
EISSN: None
Source Type: Journal
DOI: 10.1016/0141-6359(94)90018-3 Document Type: Article |
Times cited : (142)
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References (21)
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