On-wafer high-frequency measurement improvements

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1994, Pages 168-173

  Carbonero, J L ^a   Joly, R ^a   Morin, G ^a   Cabon, B ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR TRANSISTORS; CALIBRATION; ELECTRIC FREQUENCY MEASUREMENT; ELECTRIC NETWORK ANALYZERS; ELECTRIC NETWORK PARAMETERS; ERROR ANALYSIS; GATES (TRANSISTOR); SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SEMICONDUCTOR JUNCTIONS;

ON WAFER HIGH FREQUENCY MEASUREMENTS; S PARAMETERS;

MOSFET DEVICES;

EID: 0028134528     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)