Architecture combination by micro photoforming process

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 211-216

  Takagi, Tarou ^a   Nakajima, Naomasa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COMPUTER AIDED DESIGN; LITHOGRAPHY; MICROMACHINING; PHOTOCHEMICAL REACTIONS; PLASTICS FORMING; POLYMERS; SOLIDIFICATION;

COMBINED ARCHITECTURE; GLUE MECHANISM; MICROPHOTOFORMING PROCESS; STEREOLITHOGRAPHY; SURFACE MACHINING;

FABRICATION;

EID: 0028121921     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)