Fine frequency tuning in resonant sensors

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 245-250

  Cabuz, C ^a   Fukatsu, K ^a   Hashimoto, H ^a   Shoji, S ^a   Kurabayashi, T ^a   Minami, K ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT RESISTANCE; MASS SPECTROMETRY; MECHANICAL PROPERTIES; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; RESONATORS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; TUNING;

BORON PROFILE; FINE FREQUENCY TUNING; MICRO MECHANICAL RESONATOR; RESONANT SENSORS; SILICON FILM; SILICON RESONATOR; TRANSVERSAL STRESS GRADIENT;

SENSORS;

EID: 0028084695     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)