Etching defects on KOH etched silicon - implementation of silicon bench technology for low cost packaging

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 1994, Pages 625-631

  Han, Hongtao ^a   Boudreau, Robert ^a   Bowen, Terry ^a   Tan, Song sheng ^a   Reed, Michael L ^a  

^a AMP Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DEFECTS; ETCHING; MICROMACHINING; MICROSCOPIC EXAMINATION; MORPHOLOGY; OPTICAL WAVEGUIDES; OPTOELECTRONIC DEVICES; POTASSIUM COMPOUNDS; SEMICONDUCTING SILICON;

ANISOTROPIC ETCHING; ELECTRON MICROSCOPY; ETCH HILLOCK DEFECT; ETCHING DEFECT; MICROSCOPIC SURFACE ROUGHNESS; POTASSIUM HYDROXIDE; PYRAMIDAL SHAPED HILLOCKS; SILICON BENCH TECHNOLOGY; TETROMETHYL AMMONIUM HYDROXIDE;

ELECTRONICS PACKAGING;

EID: 0028074159     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)