Vacuum-encapsulated thermistor bolometer type miniature infrared sensor

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 257-262

  Mori, Takehisa ^a   Kudoh, Takeshi ^a   Komatsu, Kiyoshi ^a   Kimura, Mitsuteru ^a  

^a TERUMO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; INFRARED RADIATION; MICROMACHINING; SCHOTTKY BARRIER DIODES; SENSITIVITY ANALYSIS; SENSORS; SPECIFIC HEAT; THERMOMETERS;

GERMANIUM THIN FILM THERMISTOR; INFRARED SENSOR; SEMICONDUCTOR MICROMACHINING; TYMPANIC MEMBRANE; VACUUM ENCAPSULATED THERMISTOR BOLOMETER;

THERMISTORS;

EID: 0028061034     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)