Pimod processing and properties of a linbo3-based mfsfet for nonvolatile memories

Integrated Ferroelectrics

Volumn 4, Issue 3, 1994, Pages 191-195

  Huang, Charles H J ^a   Lin, He ^a   Rabson, Thomas A ^a  

^a RICE UNIVERSITY   (United States)

Author keywords

LiNbO; MFSFET; MOD; Nonvolatile memories

Indexed keywords

CHARGE CARRIERS; DIELECTRIC FILMS; ELECTRIC CONDUCTIVITY; ELECTRIC FIELD EFFECTS; ELECTRONIC PROPERTIES; FERROELECTRIC MATERIALS; FILM PREPARATION; LITHIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR STORAGE; SILICA;

FERROELECTRIC GATE TRANSISTOR; PHOTO INDUCED METALLO-ORGANIC DECOMPOSITION (PIMOD);

FIELD EFFECT TRANSISTORS;

EID: 0028044469     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584589408017021     Document Type: Article

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