Novel fabrication method of capillary tubes on quartz for chemical analysis applications

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 63-68

  Kaplan, W ^a   Elderstig, H ^a   Vieider, C ^a  

^a ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY TUBES; CHEMICAL ANALYSIS; CHEMICAL VAPOR DEPOSITION; ELECTROPHORESIS; ETCHING; MICROMACHINING; PHOTOLITHOGRAPHY; QUARTZ; SEMICONDUCTING SILICON; SENSORS; VLSI CIRCUITS;

CAPILLARY CHANNELS; CAPILLARY ELECTROPHORESIS; ELECTROOSMOTIC PUMPING; LOW PRESSURE CHEMICAL DEPOSITION; MICRO FLOW SYSTEM; NOVEL FABRICATION METHOD; TOTAL CHEMICAL ANALYSIS SYSTEM;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0028014980     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)