Materials for LIGA products

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 86-90

  Ehrfeld, W ^a   Abraham, M ^a   Ehrfeld, U ^a   Lacher, M ^a   Lehr, H ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTRODEPOSITION; ELECTROLYTES; GLASS; LITHOGRAPHY; METALS; MICROELECTRONIC PROCESSING; OPTICAL PROPERTIES; POLYMERS; SEMICONDUCTING SILICON; SENSORS; SILICON SENSORS;

AQUEOUS ELECTROLYTES; DEEP LITHOGRAPHY; INTEGRATED ELECTRONIC CIRCUIT; LIGA MICRODEVICES; REPLICATION PROCESS;

MICROELECTRONICS;

EID: 0028014979     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)