15b electromechanical sigma-delta converter for acceleration measurements

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 1994, Pages 160-161

  Smith, Ted ^a   Nys, Olivier ^a   Chevroulet, Michel ^a   DeCoulon, Yves ^a   Degrauwe, Marc ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION MEASUREMENT; CMOS INTEGRATED CIRCUITS; DESIGN; FABRICATION; INTERFACES (MATERIALS); MODULATORS; PERFORMANCE; SCHEMATIC DIAGRAMS; SENSORS;

CAPACITIVE ACCELEROMETER; INTERFACE CIRCUIT; POSITION MEASURING INTERFACE; SIGMA DELTA CONVERTERS;

ELECTROMECHANICAL DEVICES;

EID: 0027987532     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)