SCOPUS 정보 검색 플랫폼

Integrated Ferroelectrics

Volumn 4, Issue 3, 1994, Pages 239-246

Influence of processing conditions on hillock formation in electron-beam evaporated platinum/titanium films

(4) Eichorst, Dennis J a Blanton, Thomas N a Barnes, Craig L a Bosworth, Lloyd A a

a EASTMAN KODAK COMPANY (United States)

Author keywords

film stress; hillocks; platinum electrodes; size distribution

Indexed keywords

CRYSTAL STRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM PREPARATION; MATHEMATICAL MODELS; METALLIC FILMS; PLATINUM COMPOUNDS; STRAIN; STRESSES; THERMAL EFFECTS; THICKNESS MEASUREMENT; TITANIUM COMPOUNDS; VAPOR DEPOSITION;

CRYSTALLITE SIZE DISTRIBUTION; HILLOCKS;

FERROELECTRIC DEVICES;

EID: 0027928615 PISSN: 10584587 EISSN: 16078489 Source Type: Journal
DOI: 10.1080/10584589408017027 Document Type: Article

Times cited : (21)

References (11)

1
- 0016597422
- J. Electrochem. Soc
- A. Christou and H.M. Day, J. Electrochem. Soc., 122, 1710–1713 (1975).
- (1975) , vol.122 , pp. 1710-1713
- Christou, A.¹ Day, H.M.²

2
- 0001029816
- Sci. Tech
- T.C. Tisone and J. Drobek, J. Vac. Sci. Tech., 9, 271–275 (1972).
- (1972) , vol.9 , pp. 271-275
- Tisone, T.C.¹ Drobek, J.² Vac, J.³

3
- 84983899973
- Phys. Stat. Sol
- J. Drobek, R.C. Sun and T.C. Tisone, Phys. Stat. Sol. A, 8, 243–248 (1971).
- (1971) , vol.A , Issue.8 , pp. 243-248
- Drobek, J.¹ Sun, R.C.² Tisone, T.C.³

4
- 84947685262
- Integrated Ferroelectrics
- Proceedings 3rd Int. Symp
- P.D. Hren, S.H. Rou, H.N. Al-Shareef, M.S. Ameen, O. Auciello and A.I. Kingon, Proceedings 3rd Int. Symp. Integrated Ferroelectrics, 612–626 (1991).
- (1991) , pp. 612-626
- Hren, P.D.¹ Rou, S.H.² Al-Shareef, H.N.³ Ameen, M.S.⁴ Auciello, O.⁵ Kingon, A.I.⁶

5
- 0001772777
- Mat. Res. Soc. Symp. Proc., 243 (Ferroelectric Thin Films II)
- R. Bruchhaus, D. Pitzer, O. Eibl, U. Scheithauer and W. Hoesler, Mat. Res. Soc. Symp. Proc., 243 (Ferroelectric Thin Films II) 123–128 (1992).
- (1992) , pp. 123-128
- Bruchhaus, R.¹ Pitzer, D.² Eibl, O.³ Scheithauer, U.⁴ Hoesler, W.⁵

6
- 84947671608
- Proceedings 4th Int. Symp. Integrated Ferroelectrics
- G.A.C.M. Spierings, J.B.A. van Zon, M. Klee and P.K. Larsen, Proceedings 4th Int. Symp. Integrated Ferroelectrics, 280–289 (1992).
- (1992) , pp. 280-289
- Spierings, G.A.C.M.¹ van Zon, J.B.A.² Klee, M.³ Larsen, P.K.⁴

7
- 84947679724
- Proceedings 4th Int. Symp. Integrated Ferroelectrics
- H.N. Al-Shareef, K.D. Gifford, P.D. Hren, S.H. Rou, O. Auciello and A.I. Kingon, Proceedings 4th Int. Symp. Integrated Ferroelectrics 181–196 (1992).
- (1992) , pp. 181-196
- Al-Shareef, H.N.¹ Gifford, K.D.² Hren, P.D.³ Rou, S.H.⁴ Auciello, O.⁵ Kingon, A.I.⁶

8
- 0021311764
- IEEE (Int. Reliability Physics)
- H. Hieber and K. Pape, IEEE (Int. Reliability Physics) 128–133 (1984).
- (1984) , pp. 128-133
- Hieber, H.¹ Pape, K.²

9
- 84877409156
- Private communication
- R.C. VanNostrand, private communication (1992).
- (1992)
- VanNostrand, R.C.¹

10
- 0004133128
- Residual Stress Measurements by Diffraction and Interpretation
- Springer-Verlag Inc., New York
- I.C. Noyan and J.B. Cohen. “Residual Stress Measurements by Diffraction and Interpretation,” Springer-Verlag Inc., New York (1987).
- (1987)
- Noyan, I.C.¹ Cohen, J.B.²

11
- 84947672949
- Diffac 5000 V 2.21, Siemens Analytical X-ray Systems
- Madison, WI
- Diffac 5000 V 2.21, Siemens Analytical X-ray Systems, Madison, WI (1991).
- (1991)

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.