Test pattern to investigate the effect of capping layers on the hot carrier induced photon spectra of MOSFETs

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1994, Pages 204-207

  Lanzoni, M ^a   Selmi, L ^a   Bez, R ^a   Manfredi, M ^a  

^a UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; GATES (TRANSISTOR); HOT CARRIERS; LIGHT EMISSION; NUMERICAL ANALYSIS; PHOTONS; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SPECTRUM ANALYSIS;

CAPPING LAYER EFFECTS; HOT CARRIER INDUCED PHOTON SPECTRA; TEST PATTERNS;

MOSFET DEVICES;

EID: 0027928522     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)