Shape memory alloy thin film fabricated by laser ablation

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 355-360

  Ikuta, Koji ^a   Hayashi, Michihiro ^a   Matsuura, Toshihiko ^a   Fujishiro, Hiroyuki ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; DEPOSITION; FABRICATION; LASER APPLICATIONS; SHAPE MEMORY EFFECT; TITANIUM ALLOYS;

LASER ABLATION; SHAPE MEMORY ALLOY; TRANSFORMATION TEMPERATURE;

THIN FILMS;

EID: 0027927867     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)