IC compatible processing of Si:Er for optoelectronics

Materials Research Society Symposium Proceedings

Volumn 301, Issue , 1993, Pages 87-95

  Ren, F Y G ^a   Michel, J ^a   Sun Paduano, Q ^a   Zheng, B ^a   Kitagawa, H ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ERBIUM; INTEGRATED CIRCUITS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; TECHNOLOGY;

IC COMPATIBLE; OPTICAL INTERCONNECTION; PROCESS TECHNOLOGY;

OPTOELECTRONIC DEVICES;

EID: 0027915692     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-301-87     Document Type: Conference Paper

References (13)