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Journal of Non-Crystalline Solids

Volumn 164-166, Issue PART 2, 1993, Pages 1069-1072

Bridging nitrogen dangling bond centers and electron trapping in amorphous NH3-nitrided and reoxidized nitrided oxide films

(2) Yount, J T a Lenahan, P M a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; FILMS; OXIDES; SILICON; SOLID STATE PHYSICS;

BRIDGING NITROGEN CENTER; ELECTRON TRAPS; REOXIDIZED NITRIDED OXIDE FILMS; SILICON OXYNITRIDE DIELECTRICS;

AMORPHOUS MATERIALS;

EID: 0027906976 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/0022-3093(93)91183-4 Document Type: Article

Times cited : (26)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.