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Volumn 74, Issue 12, 1993, Pages 7551-7560
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Process-property correlations of excimer laser ablated bismuth titanate films on silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
BISMUTH COMPOUNDS;
EXCIMER LASERS;
FERROELECTRIC MATERIALS;
INTERFACES (MATERIALS);
LASER ABLATION;
OXYGEN;
PERMITTIVITY;
PLASMAS;
PRESSURE EFFECTS;
SEMICONDUCTING SILICON;
THERMAL EFFECTS;
X RAY CRYSTALLOGRAPHY;
ADATOMS;
BISMUTH TITANATE;
DENSITY OF INTERFACE STATES;
DISSIPATION FACTOR;
FERROELECTRIC FIELD EFFECT TRANSISTORS;
LASER FLUENCE;
THIN FILMS;
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EID: 0027904345
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.354981 Document Type: Article |
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Times cited : (13)
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References (0)
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