Rapid surface cleaning by spin cleaning technique

Proceedings, Annual Technical Meeting - Institute of Environmental Sciences

Volumn 1, Issue , 1993, Pages 245-254

  Kunimoto, Fumitomo ^a   Ohmi, Tadahiro ^a   Kern Jr , Fredrick W ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DECONTAMINATION; HYDRODYNAMICS; METALS; PROCESS CONTROL; ROTATING DISKS; SEALANTS; SEMICONDUCTOR DEVICE MANUFACTURE;

CHEMICAL DISTRIBUTION SYSTEMS; METAL DECONTAMINATION; NITROGEN GAS SEALS; SPIN CLEANING; SPINNERS; WAFER PROCESSING; WET STATION;

SURFACE CLEANING;

EID: 0027874559     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)