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Volumn , Issue , 1993, Pages 115-122
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Response surface methodology and its application in simulation
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Author keywords
[No Author keywords available]
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Indexed keywords
CURVE FITTING;
LEAST SQUARES APPROXIMATIONS;
OPTIMIZATION;
POLYNOMIALS;
SEMICONDUCTOR DEVICE MANUFACTURE;
STATISTICAL METHODS;
FIRST ORDER MODELS;
RESPONSE SURFACE METHODOLOGY;
COMPUTER SIMULATION;
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EID: 0027872212
PISSN: 02750708
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (21)
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References (6)
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