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Volumn 236, Issue 1-2, 1993, Pages 204-208
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Investigation of the adhesion mechanisms of silicon alloy thin films on polymer substrates by IR ellipsometry
a b a
b
AIR LIQUIDE
(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL ACTIVATION;
DEPOSITION;
ELLIPSOMETRY;
INFRARED INSTRUMENTS;
INTERFACES (MATERIALS);
PLASMA APPLICATIONS;
POLYCARBONATES;
SILICON ALLOYS;
SURFACE PHENOMENA;
SURFACE TREATMENT;
THIN FILMS;
VIBRATIONS (MECHANICAL);
ADHESION MECHANISM;
CARBON NITROGEN BOND;
FOURIER TRANSFORM SPECTROSCOPY;
INFRARED ELLIPSOMETER;
PHOTOELASTIC DEVICE;
ADHESION;
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EID: 0027871977
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/0040-6090(93)90670-K Document Type: Article |
Times cited : (7)
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References (18)
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