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Volumn 236, Issue 1-2, 1993, Pages 204-208

Investigation of the adhesion mechanisms of silicon alloy thin films on polymer substrates by IR ellipsometry

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ACTIVATION; DEPOSITION; ELLIPSOMETRY; INFRARED INSTRUMENTS; INTERFACES (MATERIALS); PLASMA APPLICATIONS; POLYCARBONATES; SILICON ALLOYS; SURFACE PHENOMENA; SURFACE TREATMENT; THIN FILMS; VIBRATIONS (MECHANICAL);

EID: 0027871977     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(93)90670-K     Document Type: Article
Times cited : (7)

References (18)
  • 12
    • 84919300227 scopus 로고    scopus 로고
    • A. Canillas, E. Pascual and B. Drévillon, Thin Solid Films, Rev. Sci. Instrum. to be published.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.