ULSI Technology Development by Predictive Simulation

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1993, Pages 701-704

  Pinto, M R ^a   Rafferty, C S ^a   Smith, R K ^a   Bude, J ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR MODEL; MOS-FET; NOVEL DEVICES; NUMERICAL ALGORITHMS; PARASITICS; PERFORMANCE; PREDICTIVE SIMULATIONS; SEMICONDUCTOR DEVICE SIMULATION; SEMICONDUCTOR PROCESS SIMULATION; TECHNOLOGY DEVELOPMENT;

ALGORITHMS; INTEGRATED CIRCUIT MANUFACTURE; MOSFET DEVICES; SIMULATION; TRANSISTORS;

PARASITIC CHARACTERIZATION; PREDICTIVE SIMULATION; PROCESS RECIPES;

ULSI CIRCUITS;

EID: 0027858125     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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