Reactive ion etching on Pt/PbZrxTi1-xO3/Pt integrated ferroelectric capacitors

Materials Research Society Symposium - Proceedings

Volumn 310, Issue , 1993, Pages 127-132

  Van Glabbeek, J J ^a   Spierings, G A C M ^a   Ulenaers, M J E ^a   Dormans, G J M ^a   Larsen, P K ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC CAPACITORS; ETCHING; FABRICATION; PLATINUM; SOL-GELS;

FERROELECTRIC CAPACITORS; LEAD ZIRCONIUM TITANATE FILMS; PLATINUM ELECTRODE; REACTIVE ION ETCHING;

FERROELECTRIC DEVICES;

EID: 0027852012     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-310-127     Document Type: Conference Paper

References (13)