CMOS/DMOS power IC technology on thin-film SOI substrates

IEEE International SOI Conference

Volumn , Issue , 1993, Pages 98-99

  Dolny, G M ^a   Ipri, A C ^a   Batty, M ^a  

^a SARNOFF CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC PROPERTIES; ELECTRON TRANSPORT PROPERTIES; ION IMPLANTATION; PHOTOLITHOGRAPHY; PRODUCT DESIGN; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS;

DMOS; ON STATE RESISTANCE; POLYSILICON;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0027851214     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)