Properties of buried SiO2 films in SIMOX structures

Materials Research Society Symposium Proceedings

Volumn 284, Issue , 1993, Pages 555-566

  Revesz, A G ^a   Brown, G A ^a   Hughes, H L ^a  

^a Revesz Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; ELECTRIC PROPERTIES; SEMICONDUCTOR DEVICE STRUCTURES; SILICA; SOLID STATE PHYSICS;

BURIED OXIDE; CONDUCTING DEFECTS; ELECTRON TRAPPING; OXYGEN DEFICIENCY; SIMOX STRUCTURES;

THIN FILMS;

EID: 0027848103     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)