An Ion Milling Pattern Transfer Technique for Fabrication of Three-Dimensional Micromechanical Structures

Journal of Microelectromechanical Systems

Volumn 2, Issue 4, 1993, Pages 151-159

  Dizon, Roberto ^a   Reed, Michael L ^a   Han, Hongtao ^a,b   Russell, Armistead G ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b AMP Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ARRAYS; ETCHING; MASKS; MEDICAL APPLICATIONS; MICROMACHINING; MICROSTRUCTURE; MILLING (MACHINING); SUBSTRATES; THREE DIMENSIONAL;

ION MILLING PATTERN TRANSFER TECHNIQUE; STENCIL MASK PATTERN; THREE DIMENSIONAL MICROMECHANICAL STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0027845301     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.273091     Document Type: Article

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