Precision SAW pressure sensors

Proceedings of the Annual Frequency Control Symposium

Volumn , Issue , 1993, Pages 665-669

  Vlassov, Yu N ^a   Kozlov, A S ^a   Pashchin, N S ^a   Yakovkin, I B ^a  

^a ENERGY SYSTEMS INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL OSCILLATORS; CRYSTAL RESONATORS; MATHEMATICAL MODELS; PRESSURE MEASUREMENT; QUARTZ; SENSITIVITY ANALYSIS; SENSORS; SUBSTRATES; TRANSFER FUNCTIONS;

INTEGRAL CRYSTAL DIAPHRAGM; PRECISION SURFACE ACOUSTIC WAVE (SAW) SENSORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0027837424     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)