Application of quartz micromachining to the realization of a pressure sensor

Proceedings of the Annual Frequency Control Symposium

Volumn , Issue , 1993, Pages 587-596

  Danel, J S ^a   Dufour, M ^a   Michel, F ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELASTICITY; ETCHING; MICROMACHINING; PRESSURE; QUARTZ; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

PRESSURE SENSOR; QUARTZ MICROMACHINING; VIBRATING BEAMS;

SENSORS;

EID: 0027836224     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)