Scanning defect-mapping system for large-area silicon substrates

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 1993, Pages 190-196

  Sopori, Bhushan L ^a   Murphy, Robert ^a   Marshall, Craig ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

STATISTICAL METHODS; THERMAL STRESS;

LARGE-AREA SILICON SUBSTRATES; OPTICAL SCANNING SYSTEM; SCANNING DEFECT-MAPPING SYSTEM; SOLAR CELL PROCESS DESIGN;

SOLAR CELLS;

EID: 0027814673     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)