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Volumn , Issue , 1993, Pages 100-101
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Acute: a high performance analog complementary polysilicon emitter bipolar technology utilizing SOI/trench full dielectric isolation
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
BIPOLAR TRANSISTORS;
CAPACITANCE;
COMPUTER SIMULATION;
GAIN CONTROL;
GATES (TRANSISTOR);
LEAKAGE CURRENTS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DOPING;
SUBSTRATES;
THERMAL EFFECTS;
THICKNESS CONTROL;
ADVANCED COMPLEMENTARY FROM UNITED TECHNOLOGIES;
BIPOLAR PROCESS TECHNOLOGY;
DIELECTRIC ISOLATION;
POLYSILICON;
SECONDARY ION MASS SPECTROSCOPY;
SILICON ON INSULATOR TECHNOLOGY;
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EID: 0027813739
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (6)
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References (3)
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