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Volumn 40, Issue 12, 1993, Pages 2287-2295

Silicon Dioxide Breakdown Lifetime Enhancement Under Bipolar Bias Conditions

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; ELECTRIC BREAKDOWN; ELECTRIC FIELD EFFECTS; INTERFACES (MATERIALS); SEMICONDUCTING SILICON COMPOUNDS; VOLTAGE MEASUREMENT; WAVEFORM ANALYSIS;

EID: 0027811720     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.249477     Document Type: Article
Times cited : (79)

References (36)
  • 1
    • 84941859128 scopus 로고
    • Time dependent dielectric breakdown of 210A oxides
    • K. Boyko, “Time dependent dielectric breakdown of 210A oxides,” in Proc. Internat. Reliability Phys. Symp., p.l, 1989.
    • (1989) Proc. Internat. Reliability Phys. Symp. , Issue.1
    • Boyko, K.1
  • 2
    • 0024860942 scopus 로고
    • A study of the breakdown testing of thermal silicon oxides and the effects of preoxidation surface treatment
    • D. B. Kao, J. M. deLarios, C. R. Helms, and B. E. Deal, “A study of the breakdown testing of thermal silicon oxides and the effects of preoxidation surface treatment,” in Proc. Internat. Reliability Phys. Symp., p. 9, 1989.
    • (1989) Proc. Internat. Reliability Phys. Symp. , pp. 9
    • Kao, D.B.1    deLarios, J.M.2    Helms, C.R.3    Deal, B.E.4
  • 3
    • 0024122432 scopus 로고
    • Modeling and characterization of gate oxide reliability
    • Dec.
    • J. C. Lee, I. C. Chen and C. Hu, “Modeling and characterization of gate oxide reliability,” IEEE Trans. Electron Devices, vol. 35, p. 2268, Dec. 1988.
    • (1988) IEEE Trans. Electron Devices , vol.35 , pp. 2268
    • Lee, J.C.1    Chen, I.C.2    Hu, C.3
  • 6
    • 0022957162 scopus 로고
    • Degradation of very thin gate oxide MOS devices under dynamic high field/current stress
    • M. S. Liang, S. Haddad, W. Cox, and S. Cagnina, “Degradation of very thin gate oxide MOS devices under dynamic high field/current stress,” in Proc. Internat. Electron Dev. Meet., 1986, p. 394.
    • (1986) Proc. Internat. Electron Dev. Meet. , pp. 394
    • Liang, M.S.1    Haddad, S.2    Cox, W.3    Cagnina, S.4
  • 8
    • 0026169486 scopus 로고
    • High-frequency time-dependent breakdown of Si02
    • June
    • E. Rosenbaum and C. Hu, “High-frequency time-dependent breakdown of Si0 2,” IEEE Electron Device Lett., vol. 12, p. 267, June 1991.
    • (1991) IEEE Electron Device Lett. , vol.12 , pp. 267
    • Rosenbaum, E.1    Hu, C.2
  • 9
    • 0017417004 scopus 로고
    • Effects of electron-beam radiation on MOS structures as influenced by the silicon dopant
    • G. A. Scoggan and T. P. Ma, “Effects of electron-beam radiation on MOS structures as influenced by the silicon dopant,” J. Appl. Phys., vol. 48, p. 294, 1977.
    • (1977) J. Appl. Phys. , vol.48 , pp. 294
    • Scoggan, G.A.1    Ma, T.P.2
  • 10
    • 0024766460 scopus 로고
    • Temperature acceleration of time-dependent dielectric breakdown
    • Nov.
    • R. Moazzami, J. C. Lee, and C. Hu, “Temperature acceleration of time-dependent dielectric breakdown,” IEEE Trans. Electron Devices, vol. 36, p. 2462, Nov. 1989.
    • (1989) IEEE Trans. Electron Devices , vol.36 , pp. 2462
    • Moazzami, R.1    Lee, J.C.2    Hu, C.3
  • 11
    • 0022986875 scopus 로고
    • Oxide breakdown dependence on thickness and hole current-enhanced reliability of ultra thin oxides
    • I. C. Chen, S. Holland, and C. Hu, “Oxide breakdown dependence on thickness and hole current-enhanced reliability of ultra thin oxides,” Internat. Electron Dev. Meet. Tech. Dig., p. 660, 1986.
    • (1986) Internat. Electron Dev. Meet. Tech. Dig. , pp. 660
    • Chen, I.C.1    Holland, S.2    Hu, C.3
  • 12
    • 36549094668 scopus 로고
    • Electron-trap generation by recombination of electrons and holes in Si02
    • I. C. Chen, S. Holland, and C. Hu, “Electron-trap generation by recombination of electrons and holes in Si0 2,” J. Appl. Phys., vol. 61, no. 9, p. 4544, 1987.
    • (1987) J. Appl. Phys. , vol.61 , Issue.9 , pp. 4544
    • Chen, I.C.1    Holland, S.2    Hu, C.3
  • 13
    • 0009797753 scopus 로고
    • Trap generation and occupation dynamics in Si02 under charge injection stress
    • Y. Nissan-Cohen, J. Shappir, and D. Frohman-Bentchkowsky, “Trap generation and occupation dynamics in Si0 2 under charge injection stress,” J. Appl. Phys., vol. 60, no. 6, p. 2024, 1986.
    • (1986) J. Appl. Phys. , vol.60 , Issue.6 , pp. 2024
    • Nissan-Cohen, Y.1    Shappir, J.2    Frohman-Bentchkowsky, D.3
  • 14
    • 36549090991 scopus 로고
    • A model for silicon-oxide breakdown under high field and current stress
    • E. Avni and J. Shappir, “A model for silicon-oxide breakdown under high field and current stress,” J. Appl. Phys., vol. 64, no. 2, p. 743, 1988.
    • (1988) J. Appl. Phys. , vol.64 , Issue.2 , pp. 743
    • Avni, E.1    Shappir, J.2
  • 15
    • 36549094375 scopus 로고
    • The effect of gate metal and Si02 thickness on the generation of donor states at the Si-Si02 interface
    • M. V. Fischetti, Z. A. Weinberg, and J. A. Calise, “The effect of gate metal and Si0 2 thickness on the generation of donor states at the Si-Si0 2 interface,” J. Appl. Phys., vol. 57, no. 2, p. 418, 1985.
    • (1985) J. Appl. Phys. , vol.57 , Issue.2 , pp. 418
    • Fischetti, M.V.1    Weinberg, Z.A.2    Calise, J.A.3
  • 16
    • 0001242030 scopus 로고
    • High-field and current-induced positive charge in thermal Si02 layers
    • Y. Nissan-Cohen, J. Shappir, and D. Frohman-Bentchkowsky, “High-field and current-induced positive charge in thermal Si0 2 layers,” J. Appl. Phys., vol. 57, no. 8, p. 2830, 1985.
    • (1985) J. Appl. Phys. , vol.57 , Issue.8 , pp. 2830
    • Nissan-Cohen, Y.1    Shappir, J.2    Frohman-Bentchkowsky, D.3
  • 17
    • 0022689456 scopus 로고
    • Hole trapping and breakdown in thin Si0 2
    • March
    • I. C. Chen, S. Holland, and C. Hu, “Hole trapping and breakdown in thin Si0 2 IEEE Electron Device Lett., vol. 7, p. 164, March 1986.
    • (1986) IEEE Electron Device Lett. , vol.7 , pp. 164
    • Chen, I.C.1    Holland, S.2    Hu, C.3
  • 18
    • 0020193537 scopus 로고
    • Comparative studies of tunnel injection and irradiation on metal oxide semiconductor structures
    • M. Knoll, D. Braunig, and W. R. Fahmer, “Comparative studies of tunnel injection and irradiation on metal oxide semiconductor structures,” J. Appl. Phys., vol. 53, no. 10, 1982.
    • (1982) J. Appl. Phys. , vol.53 , Issue.10
    • Knoll, M.1    Braunig, D.2    Fahmer, W.R.3
  • 19
    • 0022667218 scopus 로고
    • Si02-induced substrate current and its relation to positive charge in field-effect transistors
    • Z. A. Weinberg, M. V. Fischetti, and Y. Nissan-Cohen, “Si0 2 -induced substrate current and its relation to positive charge in field-effect transistors,” J. Appl. Phys., vol. 59, no. 3, p. 824, 1986.
    • (1986) J. Appl. Phys. , vol.59 , Issue.3 , pp. 824
    • Weinberg, Z.A.1    Fischetti, M.V.2    Nissan-Cohen, Y.3
  • 20
    • 0017465707 scopus 로고
    • Location of positive charges in Si02 films on Si generated by vuv photons, x rays, and high-field stressing
    • D. J. DiMaria, Z. A. Weinberg, and J. M. Aitken, “Location of positive charges in Si0 2 films on Si generated by vuv photons, x rays, and high-field stressing,” J. Appl. Phys., vol. 48, no. 3, p. 898, 1977.
    • (1977) J. Appl. Phys. , vol.48 , Issue.3 , pp. 898
    • DiMaria, D.J.1    Weinberg, Z.A.2    Aitken, J.M.3
  • 21
    • 0002772669 scopus 로고
    • Electron-hole generation, transport, and trapping in Si02
    • T. P. Ma and P. V. Dressendorfer, Eds., New York: Wiley
    • F. B. McLean, H. E. Boesch, and T. R. Oldham, “Electron-hole generation, transport, and trapping in Si0 2,” in Ionizing Radiaiton Effects in MOS Devices and Circuits, T. P. Ma and P. V. Dressendorfer, Eds., New York: Wiley 1989, p. 87.
    • (1989) Ionizing Radiaiton Effects in MOS Devices and Circuits , pp. 87
    • McLean, F.B.1    Boesch, H.E.2    Oldham, T.R.3
  • 22
    • 0020918475 scopus 로고
    • Tunneling discharge of trapped holes in silicon dioxide
    • J. F. Verweij and D. R. Wolters, Eds. Elsevier
    • S. Manzini and A. Modelli, “Tunneling discharge of trapped holes in silicon dioxide,” in Insulating Films on Semiconductors, J. F. Verweij and D. R. Wolters, Eds. Elsevier 1983, p. 112.
    • (1983) Insulating Films on Semiconductors , pp. 112
    • Manzini, S.1    Modelli, A.2
  • 23
    • 36549103418 scopus 로고
    • Logarithmic detrapping response for holes injected into Si02 and the influence of thermal activation and electric fields
    • V. Lakshmanna and A. S. Vengurlekar, “Logarithmic detrapping response for holes injected into Si0 2 and the influence of thermal activation and electric fields,” J. Appl. Phys., vol. 63, no. 9, p. 4548, 1988.
    • (1988) J. Appl. Phys. , vol.63 , Issue.9 , pp. 4548
    • Lakshmanna, V.1    Vengurlekar, A.S.2
  • 25
    • 0010984755 scopus 로고
    • Time-scale invariance in transport and relaxation
    • Jan.
    • H. Scher, M. H. Schlesinger, and J. T. Bendler, “Time-scale invariance in transport and relaxation,” Phys. Today, p. 26, Jan. 1991.
    • (1991) Phys. Today , pp. 26
    • Scher, H.1    Schlesinger, M.H.2    Bendler, J.T.3
  • 28
    • 0025464151 scopus 로고
    • Projecting gate oxide reliability and optimizing reliability screens
    • July
    • R. Moazzami and C. Hu, “Projecting gate oxide reliability and optimizing reliability screens,” IEEE Trans. Electron Devices, vol. 37, no. 7, p. 1643, July 1990.
    • (1990) IEEE Trans. Electron Devices , vol.37 , Issue.7 , pp. 1643
    • Moazzami, R.1    Hu, C.2
  • 29
    • 84939034542 scopus 로고
    • Hole transport and trapping in field oxides
    • H. E. Boesch and F. B. McLean, “Hole transport and trapping in field oxides,” IEEE Trans. Nucl. Sci., vol. 32, no. 6, p. 3940, 1985.
    • (1985) IEEE Trans. Nucl. Sci. , vol.32 , Issue.6 , pp. 3940
    • Boesch, H.E.1    McLean, F.B.2
  • 30
    • 0018107646 scopus 로고
    • Field-dependent hole transport in amorphous Si02
    • S. T. Pantelides, Ed. New York:Pergamon
    • F. B. McLean, H. E. Boesch and J. M. McGarrity, “Field-dependent hole transport in amorphous Si0 2,” in The Physics of Si0 2 and its Interfaces, S. T. Pantelides, Ed. New York: Pergamon, 1978, p. 19.
    • (1978) The Physics of Si02 and its Interfaces , pp. 19
    • McLean, F.B.1    Boesch, H.E.2    McGarrity, J.M.3
  • 31
    • 0001514594 scopus 로고
    • Impact ionization model for dielectric instability and breakdown
    • T. H. DiStefano and M. Shatzkes, “Impact ionization model for dielectric instability and breakdown,” Appl. Phys. Lett., vol. 25, no. 12, p. 685, 1974.
    • (1974) Appl. Phys. Lett. , vol.25 , Issue.12 , pp. 685
    • DiStefano, T.H.1    Shatzkes, M.2
  • 32
    • 0017005888 scopus 로고
    • Current runaway in insulators affected by impact ionization and recombination
    • N. Klein and P. Solomon, “Current runaway in insulators affected by impact ionization and recombination,” J. Appl. Phys., vol. 47, no. 10, p. 4364, 1976.
    • (1976) J. Appl. Phys. , vol.47 , Issue.10 , pp. 4364
    • Klein, N.1    Solomon, P.2
  • 33
    • 0016973174 scopus 로고
    • Impact ionization and positive charge in thin Si02 films
    • M. Shatzkes and M. Av-Ron, “Impact ionization and positive charge in thin Si0 2 films,” J. Appl. Phys., vol. 47, no. 7, p. 3192, 1976.
    • (1976) J. Appl. Phys. , vol.47 , Issue.7 , pp. 3192
    • Shatzkes, M.1    Av-Ron, M.2
  • 34
    • 0018062167 scopus 로고
    • Defects and impurities in thermal Si02
    • S. T. Pantelides, Ed. Pergamon
    • D. J. DiMaria, “Defects and impurities in thermal Si0 2,” in The Physics of Si0 2 and its Interfaces, S. T. Pantelides, Ed. Pergamon, 1978, p. 160.
    • (1978) The Physics of Si02 and its Interfaces , pp. 160
    • DiMaria, D.J.1
  • 36
    • 0003164115 scopus 로고
    • Two-carrier nature of interface-state generation in hole trapping and radiation damage
    • S. K. Lai, “Two-carrier nature of interface-state generation in hole trapping and radiation damage,” Appl. Phys. Lett., vol. 39, no. 1, p. 58, 1981.
    • (1981) Appl. Phys. Lett. , vol.39 , Issue.1 , pp. 58
    • Lai, S.K.1


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