Application of a cluster tool for interface engineering of polysilicon emitters

Proceedings of the 1993 Bipolar/Bicoms Circuits and Technology

Volumn , Issue , 1993, Pages 49-52

  Reuss, Robert H ^a   Werkhoven, C ^a   Granneman, E ^a   Hendricks, M ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; ETCHING; GATES (TRANSISTOR); HYDROFLUORIC ACID; IN SITU PROCESSING; INTERFACES (MATERIALS); PROCESS CONTROL; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; THICKNESS CONTROL; THIN FILMS;

CLUSTER TOOL TECHNIQUE; INTERFACE ENGINEERING; POLYSILICON EMITTERS;

BIPOLAR TRANSISTORS;

EID: 0027809029     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/bipol.1993.617468     Document Type: Conference Paper

References (5)