Quantitative model for interpreting nanometer scale hardness measurement of thin films

Materials Research Society Symposium - Proceedings

Volumn 308, Issue , 1993, Pages 201-208

  Poisl, W H ^a   Fabes, B D ^a   Oliver, W C ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HARDNESS TESTING; SAPPHIRE; SUBSTRATES; TANTALUM COMPOUNDS; TITANIUM;

DEPTH SENSING INDENTATION; NANOMETER SCALE;

THIN FILMS;

EID: 0027796456     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)