Microstructuring technology

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1993, Pages 515-524

  Lubitz, K ^a   Wolff, A ^a   Preu, G ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; CERAMIC MATERIALS; COMPOSITE STRUCTURES; FABRICATION; MICROSTRUCTURE; PHOTOLITHOGRAPHY;

DICE AND FILL TECHNIQUE; LOST MOULD METHOD; MICROSTRUCTURING;

PIEZOELECTRIC TRANSDUCERS;

EID: 0027735733     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1993.339556     Document Type: Conference Paper

References (19)