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Volumn 140, Issue 12, 1993, Pages 3679-3683
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Electrical Properties of Amorphous Silicon Transistors and MIS–Devices: Comparative Study of Top Nitride and Bottom Nitride Configurations
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC PROPERTIES;
LIQUID CRYSTAL DISPLAYS;
SILICON COMPOUNDS;
THIN FILMS;
TRANSISTORS;
AMORPHOUS SILICON TRANSISTORS;
BOTTOM NITRIDE (BN) CONFIGURATIONS;
TOP NITRIDE (TN);
MIS DEVICES;
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EID: 0027735508
PISSN: 00134651
EISSN: 19457111
Source Type: Journal
DOI: 10.1149/1.2221149 Document Type: Article |
Times cited : (239)
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References (17)
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