SAW characteristics of sputtered aluminum nitride on silicon

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1993, Pages 267-271

  Liaw, H M ^a   Cronin, W ^a   Hickernell, F S ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC WAVE TRANSMISSION; ALUMINUM COMPOUNDS; EPITAXIAL GROWTH; FILM GROWTH; FILM PREPARATION; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; THICK FILMS;

ALUMINUM NITRIDE FILMS; HIGHLY ORIENTED FINE GRAINED POLYCRYSTALLINE FILMS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0027711517     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1993.339574     Document Type: Conference Paper

References (15)