Structural Characteristics of Bias Sputtered Cocrta/Cr Films

IEEE Transactions on Magnetics

Volumn 29, Issue 6, 1993, Pages 3676-3678

  Deng, Youping ^a   Lambeth, David N ^a   Laughlin, David E ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM COMPOUNDS; CRYSTAL STRUCTURE; MICROSTRUCTURE; SPUTTERING; X RAY ANALYSIS;

BIAS SPUTTERED FILMS; STRUCTURAL CHARACTERISTICS;

CRYSTALLOGRAPHY;

EID: 0027697905     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.281266     Document Type: Article

References (11)

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