Cross section measurements for electron-impact dissociation of sif4 into neutral radicals

Journal of Physics D: Applied Physics

Volumn 26, Issue 11, 1993, Pages 1909-1915

  Nakano, T ^a   Sugai, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON-IMPACT DISSOCIATION; SILICON SUBSTRATES; TETRAFLUOROSILANES;

FLUORINE CONTAINING POLYMERS; SILANES; SPRAYED COATINGS;

PLASMA SPRAYING;

EID: 0027697689     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/26/11/011     Document Type: Article

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