A valveless diffuser/nozzle-based fluid pump

Sensors and Actuators: A. Physical

Volumn 39, Issue 2, 1993, Pages 159-167

  Stemme, Erik ^a   Stemme, Göran ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; NOZZLES; VALVES (MECHANICAL); VIBRATIONS (MECHANICAL);

FLUID PUMPS; OSCILLATING DIAPHRAGMS; VALVELESS DIFFUSERS; VIBRATING DIAPHRAGMS;

PUMPS;

EID: 0027695246     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)80213-Z     Document Type: Article

References (14)

1. A pump based on micro-engineering techniques
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4. Microfabrication of sub micron nozzles in silicon nitride
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6. Piezoelectric micropump with three valves working peristaltically
7. A piezoelectric micropump based on micromachining of silicon
8. A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices
9. Micropump and sample-injector for integrated chemical analyzing systems
10. A micro membrane pump with electrostatic actuation