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Volumn 29, Issue 6, 1993, Pages 3688-3690

Development of Columnar Microstructure in Magnetron Sputter Deposited CoPtCr/Cr Magnetic Thin Films

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM ALLOYS; MAGNETIC MATERIALS; MAGNETIC THIN FILMS; MICROSTRUCTURE; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0027694908     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.281270     Document Type: Article
Times cited : (7)

References (10)
  • 1
    • 0013364398 scopus 로고
    • Revised Structure Zone Model For Thin Film Physical Structure
    • A
    • R. Messier, A. P. Gin and R. A. Roy, “Revised Structure Zone Model For Thin Film Physical Structure”, J. Vac. Sci. Technol., A, No. 2, p.500, 1984.
    • (1984) J. Vac. Sci. Technol. , Issue.2 , pp. 500
    • Messier, R.1    Giri, A.P.2    Roy, R.A.3
  • 2
    • 0017632484 scopus 로고
    • Columnar Microstructure in Vapor-Deposited Thin Films
    • A. G. Dirks and H. J. Leamy, “Columnar Microstructure in Vapor-Deposited Thin Films”, Thin Solid Films, vol. 47, p.219, 1977
    • (1977) Thin Solid Films , vol.47 , pp. 219
    • Dirks, A.G.1    Leamy, H.J.2
  • 3
    • 84944376043 scopus 로고
    • Magnetron Sputter Deposited CoPtCr Magnetic Thin Films for Information Storage
    • Univ. of Utah
    • M. R. Kim, “Magnetron Sputter Deposited CoPtCr Magnetic Thin Films for Information Storage”, Ph.D. Dissertation, Univ. of Utah, 1993.
    • (1993) Ph.D. dissertation
    • Kim, M.R.1
  • 6
    • 0026911563 scopus 로고
    • Dependence of Magnetic Media Noise On Cr Underlayer Thickness
    • K. E. Johnson, M. R. Kim, and S. Guruswamy, “Dependence of Magnetic Media Noise On Cr Underlayer Thickness”, IEEE Trans. vol. 28, No. 1992.
    • (1992) IEEE Trans. Magn. , vol.28 , Issue.5 , pp. 3099
    • Johnson, K.E.1    Kim, M.R.2    Guruswamy, S.3
  • 7
    • 84953682805 scopus 로고
    • The microstructure of Sputter Deposited Coatings
    • J. A. Thornton, “The microstructure of Sputter Deposited Coatings”, J. Vac. Sci. Technol., A, vol. 4, no. 6, p.3059, 1986.
    • (1986) J. Vac. Sci. Technol., A , vol.4 , Issue.6 , pp. 3059
    • Thornton, J.A.1
  • 8
    • 0026911405 scopus 로고
    • The Effect of Low Mobility sputter Conditions On The Thin Film Tribology
    • K. J. Schulz, K. V. Viswanathan, A. C. Wall, and A. J. Bowen, “The Effect of Low Mobility sputter Conditions On The Thin Film,” IEEE Trans. vol.28, No.5, p.2527, 1992.
    • (1992) IEEE Trans. Magn. , vol.28 , Issue.5 , pp. 2527
    • Schulz, K.J.1    Viswanathan, K.V.2    Wall, A.C.3    Bowen, A.J.4
  • 9
    • 36549102302 scopus 로고
    • Stress and microstructure of sputter deposited thin films
    • K. H. Muller, “Stress and microstructure of sputter deposited thin films”, J. Appl. Phys., vol. 62, No. 5, p.1796, 1987.
    • (1987) J. Appl. Phys. , vol.62 , Issue.5 , pp. 1796
    • Muller, K.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.