Easy Process for Fabrication of High-Reliability DC-SQUIDs

IEEE Transactions on Magnetics

Volumn 29, Issue 6, 1993, Pages 3562-3564

  Chinone, K ^a   Ataka, T ^a   Shimizu, N ^a  

^a SEIKO INSTRUMENTS INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; RELIABILITY;

BIOMAGNETISM; DC SQUID;

SUPERCONDUCTING DEVICES;

EID: 0027694358     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.281230     Document Type: Article

References (4)

1. K. Iramina and S. Ueno, “Mechanism of Flux Reversal Phenomena in Spatial Distributions of the Magnetoencephalograms”, Advances in Biomagnetism, edited by S.J. Williamson et al. Plenum Press, New York, pp.619–622, 1989
2. M. Koyanagi, N. Kasai, K. Chinone, N. Nakanishi, M. Higuchi and K. Kado, “An Integrated DC-SQUID Gradiometer For Biomagnetic Application”, IEEE Trans. Mag. Vol. 25, No. 2, pp.l 166–1169, 1989
3. N. Shimizu, N. Chiba, S. Yabe, T. Ishikawa, K. Chinone and S. Kiryu, “Performance of DC-SQUIDs Fabricated on 4-inch Silicon Wafer”, IEEE Trans. Appl. Superconductivity, Vol. 3, No.1, pp. 1828–1831, 1992
4. K. Chinone, N. Chiba, S. Nakayama, N. Shimizu, S. Kiryu and N. Kasai, “DC-SQUID System With Flexible Pickup Coil Connected By a Novel Superconducting Technique”, IEEE Trans. Appl. Superconductivity, Vol. 3, No.1, pp. 1898–1901, 1992