Apfim studies of compositional inhomogeneity in sputtered Co-Cr thin films

IEEE Transactions on Magnetics

Volumn 29, Issue 6, 1993, Pages 3745-3747

  Hono, K ^a   Maeda, Y ^b   Li, J L ^a   Sakurai, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b NTT Basic Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSTRUCTURE; NUCLEAR MAGNETIC RESONANCE; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

ATOM PROBE ANALYSIS; COMPOSITIONAL INHOMOGENEITY;

THIN FILMS;

EID: 0027694176     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.281289     Document Type: Article

References (11)

1. Y. Maeda, S. Hirono and M. Asahi, “TEM observation of microstructure in sputtered Co-Cr film”, Jpn. J. Appl. Phys. 24, L951 (1985).
2. M. Hasebe, K. Oikawa and T. Nishizawa, “Computer calculation of phase diagrams of Co-Cr and Co-Mn systems”, J. Jpn. Inst. Metals, 46, 577 (1982).
3. L. H. Chan, G. Thomas and J.-S. Gau, “Magnetic properties and microstructure of Co-Cr bulk alloys”, J. Mag. Mag. Mater. 79, 95 (1989).
4. Y. Maeda and M. Takahashi, “Compositional microstructures within Co-Cr film grains”, Jpn. J. Appl. Phys. 28, L248 (1989).
5. K. Takei and Y. Maeda, “NMR study of compositional inhomogeneities in sputtered Co-Cr films”, Jpn. J. Appl. Phys. 30, L1125 (1991).
6. Y. Maeda and M. Takahashi, “Thermomagnetic analysis of compositional separation in sputtered Co-Cr films”, J. Appl. Phys. 68, 4751 (1990).
7. D. J. Rogers, J. N. Chapman, J. P. C. Bernards and S. B. Luitjens, “Determination of local composition in co-Cr films deposited at different substrate temperatures”, IEEE Trans. Mag. 25, 4180 (1989).
8. M. K. Miller and G. D. W. Smith, Atom Probe Microanalysis: Principles and Applications to Materials Problems, MRS, Pittsburgh, 1989.
9. N. Hasegawa, K. Hono, R. Okano, H. Fujimori and T. Sakurai, “A method for preparing atom probe specimens for nanoscale compositional analysis of metallic thin films”, Appl. Surf. Sci. 67, 407 (1993).
10. K. Hono, T. Hashizume and T. Sakurai, “The IMR atom probe”, Surf. Sci. 266, 506 (1992).
11. K. Hono, B. G. Demczyk, and D. E. Laughlin, “Electron microdiffracton of faulted regions in Co-Cr and Co-Ni-Cr thin films”, Appl. Phys. Let. 55 (1989), 229.