Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding

Applied Optics

Volumn 32, Issue 32, 1993, Pages 6464-6469

  Brenner, K H ^a   Kufner, M ^a   Kufner, S ^a   Moisel, J ^a   Muller A ^a   Sinzinger, S ^a   Testorf, M ^a   Gottert J ^b   Mohr, J ^b  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Refractive micro optics; Three dimensional integration

Indexed keywords

ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; ESTERS; MICROOPTICS; MOLDING; PLASTICS MOLDING; SYNCHROTRON RADIATION; THREE DIMENSIONAL INTEGRATED CIRCUITS; LITHOGRAPHY; OPTICAL DEVICES; PLASTICS;

EXPERIMENTAL SYSTEM; HIGH ENERGY SYNCHROTRON; INTEGRATED OPTICAL CIRCUIT; MICRO-OPTICAL COMPONENTS; OPTICAL COMPONENTS; PROPAGATION OF LIGHTS; REFRACTIVE MICRO-OPTICS; THREE DIMENSIONAL INTEGRATION;

LIGHT; OPTICAL WAVEGUIDES;

ELECTROFORMING; MICROOPTICAL COMPONENTS; PLASTIC MOLDING; REFRACTIVE MICROOPTICS;

EID: 0027687339     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.32.006464     Document Type: Article

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