Relation between light scattering and the microstructure of optical thin films

Applied Optics

Volumn 32, Issue 28, 1993, Pages 5475-5480

  Duparré, Angela ^a   Kassam, Samer ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Light scattering; Optical thin films; Thin film microstructure

Indexed keywords

FILM GROWTH; FILM THICKNESS; FLUORINE COMPOUNDS; LIGHT SCATTERING; MICROSTRUCTURE; OXIDE FILMS; SURFACE ROUGHNESS; THIN FILMS; MATHEMATICAL MODELS; OXIDES; SUBSTRATES; SURFACE PROPERTIES;

ANGLE RESOLVED SCATTERING; CHALCOGENIDE FILMS; OPTICAL THIN FILMS; QUANTITATIVE INFORMATION; QUARTZ CRYSTAL MONITORING; SQUARE-ROOT DEPENDENCE; THIN FILM MICROSTRUCTURES; VOLUME SCATTERING;

OPTICAL FILMS;

ANGLE RESOLVED SCATTERING (ARS); PACKING DENSITIES; ROUGHNESS INDUCED SCATTERING; TOTAL INTEGRATED SCATTERING (TIS); VOLUME SCATTERING;

EID: 0027685097     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.32.005475     Document Type: Article

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