Synthesis and research of the optimum conditions for the optical monitoring of non-quarter-wave multilayers

Applied Optics

Volumn 32, Issue 28, 1993, Pages 5612-5618

  Grbzes Besset, C ^a   Chazallet, F ^a   Albrand, G ^b   Pelletier, E ^b  

^a Societe INOPTIC ^*  (France)

^b Laboratoire Signal et Image   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR COMPENSATION; FILM PREPARATION; ION BEAM ASSISTED DEPOSITION; ION IMPLANTATION; REFRACTIVE INDEX; SPUTTERING; OPTICAL COATINGS; OPTIMAL CONTROL SYSTEMS; PLATING; PROCESS CONTROL; THICKNESS CONTROL; THIN FILMS; VAPOR DEPOSITION;

CONTROL WAVELENGTH; HIGH PERFORMANCE COATINGS; ION ASSISTED DEPOSITION; MONITORING PROCESS; OPTICAL MONITORING; OPTICAL THIN FILMS; OPTIMUM CONDITIONS; QUARTER WAVE STACKS;

OPTICAL MULTILAYERS;

NONQUARTER WAVE MULTILAYERS; OPTICAL MONITORING; QUARTER WAVE STACKS;

EID: 0027683122     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.32.005612     Document Type: Article

References (18)

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