Rapid communication voltage contrast in integrated circuits with 100 nm spatial resolution by scanning force microscopy

Journal of Physics D: Applied Physics

Volumn 26, Issue 10, 1993, Pages 1801-1805

  Bohm C ^a   Saurenbadr, F ^b   Taschner, P ^a   Roths, C ^a   Kubalek, E ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACTLESS DEVICE INTERNAL TEST TECHNIQUE; DYNAMIC VOLTAGE CONTRAST; PASSIVATED INTEGRATED CIRCUITS; SCANNING FORCE MICROSCOPY; SPATIAL RESOLUTION; STATIC VOLTAGE CONTRAST;

INTEGRATED CIRCUIT TESTING; MICROSCOPIC EXAMINATION; NONDESTRUCTIVE EXAMINATION; OPTICAL RESOLVING POWER; PASSIVE NETWORKS; VOLTAGE MEASUREMENT;

INTEGRATED CIRCUITS;

EID: 0027677021     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/26/10/041     Document Type: Article

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