Investigations of the Growth of TiN Thin Films from Ti(NMe2)4 and Ammonia

Journal of the Electrochemical Society

Volumn 140, Issue 9, 1993, Pages 2695-2702

  Prybyla, J A ^a   Chiang, C M ^a   Dubois, L H ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; DEPOSITION; SPECTROSCOPY; THIN FILMS; TITANIUM COMPOUNDS;

GAS DELIVERY SYSTEM; GROWTH MECHANISM; REACTANT STICKING COEFFICIENTS; RUTHERFORD BACKSCATTERING;

EPITAXIAL GROWTH;

EID: 0027662669     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2220889     Document Type: Article

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