Needle sensor-a micromechanical detector for atomic force microscopy

International Journal of Optoelectronics

Volumn 8, Issue 5-6, 1993, Pages 669-676

  Bartzke, K ^a   Antrack, T ^a   Schmidt, K H ^a   Dammann, E ^a   Schatterny, CH ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; MICROSCOPIC EXAMINATION; PHOTODETECTORS;

ATOMIC FORCE MICROSCOPY; MICROMECHANICAL DETECTORS;

SENSORS;

EID: 0027660610     PISSN: 09525432     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)